Method of fabricating semiconductor device

ABSTRACT

A method includes: forming an device isolation region in a substrate to divide the device isolation region into first and second diffusion regions; forming a target film on the substrate; forming a hard mask layer and a first resist layer on the film; forming a first pattern on the first resist layer; etching the hard mask layer by using the first pattern as a mask; forming a second resist layer on the hard mask layer; forming a second pattern including a first space on the second resist layer for isolating the first pattern; forming a third pattern including a second space shrunk from the first space on the hard mask layer by carrying out size conversion etching by using the second pattern formed on the second resist layer as a mask; and etching the film to be processed by using the third pattern formed on the hard mask layer.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a continuation of co-pending application Ser. No.13/328,331 filed on Dec. 16, 2011, which is a division of applicationSer. No. 12/205,950 filed on Sep. 8, 2008, which claims foreign priorityto Japanese patent application No. 2007-232629 filed on Sep. 7, 2007.The entire content of each of these applications is hereby incorporatedby reference.

BACKGROUND OF THE INVENTION

The present invention relates to a method of fabricating a semiconductordevice. In more particular, the present invention relates to a method offabricating a semiconductor device with a high-degree of integration,and relates to a fine pattern formation method of separates interconnectpattern in devices such as transistors by using dimension controltechnique.

In recent years, there is a continuing trend of manufacturingsemiconductor devices which are finer and finer and more and moreintegrated. This scaling-trend results in shorter gate lengths in MOStransistors mounted on LSI circuits and shorter distance and smallerpitch of mutually adjacent wirings. Similarly, also for memory cell suchas of an SRAM mounted on LSI circuits, there is a demand for reductionin bit costs by increasing packing density. Therefore, resolutionenhancement technique (RET) such as an alternative phase-shifting mask(e.g. Levenson phase shift mask) technology is used to meet the demandfor size reduction. However, the changing of the demand for sizereduction of the semiconductor device is faster than improvement ofresolution in lithography. Therefore, instead of the resolutionimprovement in lithography, resist trimming process which decreasephotoresist pattern size by isotropic dry-etching of patternedphotoresist (e.g. for a gate electrode arranged in line-and-space) is inpractical use to make fine patterns that is below the resolution limitof the current lithography. Japanese Patent Laid-Open No. 2004-103999discloses a technology of forming a fine pattern for LSI circuit, byforming a first pattern and then forming a fine space pattern to becomea second pattern through exposure and development. On the other hand,Japanese Patent Laid-Open No. 2005-166884 carries out processing on filmto be processed with a space control film and a resist mask for forminga fine space superior to a space which the lithographic resolutiontechnology attains.

Japanese Patent Laid-Open No. 2006-41364 discloses a method of formingwirings wherein an anti-reflective coating film is etched with gasconsisted of CHF3, CF4 and O2. The document specifies that etching on ananti-reflective coating film with etching gas of CHF3:O2=1:1 to 9:1enables etching without changing the pattern size.

Japanese Patent Laid-Open No. 2006-156657 discloses a technology offorming a fine pattern below resolution limit of lithography, by forminga first pattern on an electrically conductive film within lithographyresolution and then trimming this first pattern by dry-etching. (FIG. 9)

Japanese Patent Laid-Open No. 2002-198362 and Japanese Patent Laid-OpenNo. 2002-141336 disclose a method of forming a contact hole by usingmixing gas of O2 (etching agent) and added gas enhancing deposition suchas CH2F2 or CHF3. In the document, it is described to adjust CH2F2 gasflow to control the diameter of the contact hole.

However, the present inventor has found out problems to be describedbelow. Desired properties of semiconductor devices are unavailable sincedisplacement takes place in a portion requiring overlapping betweenwiring pattern and its upper or lower conductor layer which isconnecting to the wiring pattern when displacement in a second patternoccurs at the occasion of forming a wiring pattern by dividing the firstpattern with the second pattern.

SUMMARY

In one aspect, the present invention includes the steps of: forming andevice isolation region in a substrate to divide the diffusion regioninto a first and a second regions; forming a film to be processed on thesubstrate; forming a hard mask layer and a first resist layer on thefilm to be processed; forming a first pattern on the first resist layer;etching the hard mask layer by using the first pattern as a mask;forming a second resist layer on the hard mask layer; forming a secondpattern including a first space (to divide the first pattern) on thesecond resist layer; forming a third pattern including a second spaceshrunk from the first space on the hard mask layer by carrying out sizeconversion etching by using the second pattern formed on the secondresist layer as a mask; and etching the film to be processed by usingthe third pattern formed on the hard mask layer.

In another aspect, the present invention includes the steps of: forminga film to be processed on a substrate; forming a hard mask layer and afirst resist layer on the film to be processed; forming a first patternon the first resist layer; etching the hard mask layer by using thefirst pattern as a mask; forming a second resist layer on the hard masklayer; forming a second pattern including a first space (to divide thefirst pattern) on the second resist layer; forming a third patternincluding a second space shrunk from the first space on the hard masklayer by carrying out size conversion etching by using the secondpattern formed on the second resist layer as a mask; etching the film tobe processed by using the third pattern formed on the hard mask layer toform a first wiring pattern and a second wiring pattern; forming aninterlayer insulating film on the film to be processed; and forming afirst and a second contact holes bringing the first wiring pattern andthe second wiring pattern respectively into connection to the interlayerfilm.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other objects, advantages and features of the followingdescription taken in conjunction with the accompanying drawings, inwhich:

FIGS. 1(A) to 1(D) are cross-sectional views illustrating a method offabricating a semiconductor device according to an embodiment of thepresent invention;

FIG. 2 illustrates a process flow of a second embodiment of the presentinvention;

FIGS. 3(A) to 3(C) are cross-sectional views illustrating a method offabricating a semiconductor device according to an embodiment of thepresent invention;

FIGS. 4(A) to 4(C) are top views illustrating a method of fabricating asemiconductor device according to an embodiment of the presentinvention;

FIGS. 5(A) to 5(C) are cross-sectional views illustrating a method offabricating a semiconductor device according to an embodiment of thepresent invention;

FIGS. 6(A) to 6(C) are top views illustrating a method of fabricating asemiconductor device according to an embodiment of the presentinvention;

FIGS. 7(A) to 7(C) are top views illustrating a method of fabricating asemiconductor device according to an embodiment of the presentinvention;

FIG. 8 is a graph illustrating relation between the dimension betweenSRAM counter electrodes and the depth of focus (DOF) in trim exposure;

FIG. 9(A) and FIG. 9(B) are plan views illustrating a method offabricating a conventional semiconductor device;

FIG. 10(A) and FIG. 10(B) are cross-sectional views of diagramsillustrating a method of fabricating a conventional semiconductordevice;

FIG. 11 is a graph illustrating the relation between size conversiondifference (changing of dimension from resist pattern into etchedhardmask) and the flow rate of etching gas;

FIG. 12 is a graph illustrating the relation between film thickness of ahard mask layer and size conversion difference;

FIG. 13 is a process flow chart of a third embodiment of the presentinvention;

FIGS. 14(A1), (A2), (B1), (B2), (C1) and (C2) illustrate explanatorydiagrams of a method of fabricating a semiconductor device of the thirdembodiment of the present invention;

FIG. 15(A) is a diagram illustrating FIG. 14(B2) together with across-sectional view; and

FIG. 15(B) is a diagram illustrating FIG. 14(C2) together with across-sectional view.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

A preferable embodiment of a method of fabricating a semiconductordevice according to the present invention will be described withreference to the drawings and illustrative embodiments. Here, likenumerals denote like elements to omit overlapping description on thedrawings. Those skilled in the art will recognize that many alternativeembodiments can be accomplished using the teachings of the presentinvention and that the invention is not limited to the embodimentsillustrated for explanatory purposes.

First Embodiment

FIG. 1 is a cross-sectional view illustrating an embodiment of a methodof fabricating a semiconductor device according to the presentinvention.

A method of fabricating semiconductor devices of the present embodimentincludes a processing a mask layer 10 on a substrate 50 by using aresist 70 a including a first pattern to attain a second pattern (FIGS.1(A) to 1(C)), and etching a wiring layer 40 formed on a substrate 50 byusing the mask layer 10 a processed to the second pattern as a mask(FIG. 1(D)). Here, the space width c of the second pattern is processedto get narrower than the space width b of the first pattern.

The respective steps in the method of fabricating semiconductor devicesin the present embodiment will be described below.

At first, as illustrated in FIG. 1(A), diffusion regions 80 are formedin a predetermined pitch. A gate insulating film 45 is formed on asubstrate 50 where device isolation (STI) region (oxide film) 55 isformed between the diffusion regions 80. Next, a polysilicon film 40 asa wiring layer is formed on this gate insulating film 45. Next, a firsthard mask layer 30, a second hard mask layer 20 and a third hard masklayer 10 are formed in this order on this polysilicon film 40. Next, ananti-reflective coating (ARC) film 60 is formed on the third hard masklayer 10. Next, a resist (for example, an ArF resist) 70 is applied anddeposited. Next, this resist is exposed to the ArF light and developedby using a photomask (not illustrated in the drawing) including a firstpattern. Thereby, a resist 70 a including a first pattern is formed asillustrated in FIG. 1(B). During the unit to form the resist 70 aincluding this first pattern, a region of an immediately upper portionto be removed in the polysilicon film 40 in the resist 70 is removed toprovide a width b.

SiOC, SiO2, SiON, SiN, SiC, SiOF or SiCN, for example, can be used asthe first, second and third hard mask layers 30, 20 and 10.

Next, as illustrated in FIG. 1(C), an anti-reflective coating film 60and the third hard mask layer 10 are etched by using a resist 70 a as amask where the first pattern is transferred. Thereby, the second hardmask layer 20 is exposed and the third hard mask layer 10 a includingthe second pattern is formed. Here, the third hard mask layer 10 a isetched to get a space width c which is narrower than the space width bof the resist 70 a.

Etching gas usable for etching includes fluorocarbon gas expressed byCxHyFz (x=1 to 5, y=0 to 3, z=1 to 8) or its mixture. Preferably CHF3 orCH2F2 and, otherwise, mixed gas thereof is used as such fluorocarbongas. In addition to such fluorocarbon gas, one or more kinds of gasesselected from the group of He, Ar, O2, N2 and CF4 can be used.

Next, as illustrated in FIG. 1(D), the third hard mask layer 10 aincluding the second pattern is masked so that the remaining resist 70a, the remaining anti-reflective coating film 60 a, the second hard masklayer 20, the first hard mask layer 30 and the wiring layer 40 areetched. Thereby, the gate insulating film 45 is exposed and the wiringlayer 40 a with a space width d is formed. The space width d isapproximately equal to the space width c. The space width d of thewiring layer is processed to be smaller than the space width b so thatthe wiring protruding dimension will become a1. Thus, the distancebetween the wiring end and the diffusion region can be securedsufficiently.

Here, the method of fabricating the present embodiment will be comparedwith the method of fabricating the prior arts. FIGS. 10(A) and 10(B) arecross-sectional views illustrating etching steps of the prior arts. Inthe prior arts, etching is carried out with the resist 70 a with thespace width e as a mask. At the occasion of forming the third hard masklayer 10 a, the space width of the third hard mask layer 10 a to beobtained will be e (FIG. 10(A)). Accordingly, the wiring layer 40 isetched with this third hard mask layer 10 a as a mask and, then, awiring layer 40 a including a space width f approximately equal to e isformed (FIG. 10(B)). In that case, the wiring protruding dimension a2cannot be secured sufficiently.

On the other hand, the present invention can make the space width d ofthe wiring layer 40 a narrower than the space width b of the resist 70 a(FIG. 1). Thereby, wiring isolation with a pattern which is finer thanthe pattern of the resist can be carried out.

Second Embodiment

For the present embodiment, a method of fabricating a cell will bedescribed with a method of fabricating the semiconductor deviceillustrated in FIG. 1. In the present embodiment, a case of forming SRAMcounter gate electrodes by causing the wiring layer to undergo wiringisolation by being subjected to trim etching on the wiring layer in acircuit with the distance between the diffusion regions 80 illustratedin FIG. 1(A) being 200 nm will be described.

FIG. 2 illustrates a process flow of a method of fabricating asemiconductor device of the present embodiment. In addition, FIG. 3 andFIG. 5 are cross-sectional views illustrating flow of the steps, whereinFIG. 4 is a top view corresponding to FIG. 3 and FIG. 6 is a top viewcorresponding to FIG. 5. Here, the cross-sectional views aresignificantly different depending on the cutting sites. Therefore,taking FIG. 3 as the cross-sectional view in the X direction of thesubstrate, FIG. 5 is the cross-sectional view in the Y direction, forexample. In addition, for the purpose of description, FIG. 3(C) (FIG.4(C)) and FIG. 5(A) (FIG. 6(A)) are drawings of the same step withdifferent cross-sectional faces. The cross-sectional view along the lineA-A′ corresponds to FIG. 5(A).

FIGS. 7(A) to 7(C) are top views of FIGS. 1(B) to 1(D) or FIGS. 5(A) to5(C) respectively and correspond to FIGS. 6(A) to 6(C). For the purposeof description, in FIG. 7, a diffusion region layer 80, a hard masklayer 10, an opening 100 of a second pattern 70, a third pattern 40 awhich is formed on a film to be processed are illustrated.

A method of processing the film to be processed will be describedaccording to FIG. 2 with reference to FIG. 3 to FIG. 7 includingcross-sectional views and top views. In a substrate, device isolation 55is formed and diffusion region 80 is divided into a first diffusionregion and a second diffusion region (80). (STEP 1) After a gateinsulating film 45 is formed on this substrate, a film to be processed40 is formed (STEP 2) so that a hard mask layers (for example, 10, 20and 30) consisting of a single layer or a plurality of layers are formed(STEP 3) to form a first resist layer (STEP 4). Not only the resistlayer 70 but also the anti-reflective coating film 60 can be used forthe first resist layer. In that case, forming a first pattern (70 c inFIG. 3(A): STEP 5) in the first resist layer, a top view illustrated inFIG. 4(A) will be obtained. The hard mask layer 10 is etched by usingthis first pattern 70 c. Thereby, a first pattern 10 b is formed in thehard mask layer 10 (STEP 6 in FIG. 3(B)). This top view is illustratedby FIG. 4(B).

Subsequently, a second resist layer is formed on the hard mask layer 10on which the first pattern is formed. The second resist layer is alsoformed by using the resist layer 70 and the anti-reflective coating film60 likewise the first resist layer (STEP 7). On this second resistlayer, the second pattern 70 a is formed on the resist film 70 as in thetop view illustrated in FIG. 4(C) (likewise FIG. 6(A)) (STEP 8). Thesecond pattern 70 a is a pattern including a first space b to divide thefirst pattern. With this second pattern 70 a, size conversion trimetching is carried out under conditions to be described later. Thereby,a third pattern 10 a is formed on the hard mask layer 10 (step 9 in FIG.5(B)). FIG. 6(B) is a top view after forming the third pattern 10 a andremoving the second resist layer. That is, the state where the thirdpattern 10 a made of the hard mask layer 10 is formed on the film to beprocessed according to STEP 1 to STEP 9. The third pattern 10 a is apattern including a second space c formed by the second pattern 70 c onthe first pattern 10 b. This second space c is formed to be narrowerthan the first space b by the size conversion etching by using thesecond pattern 70 c.

A third pattern 40 a is formed (FIG. 5(C)) on the film to be processed40 by processing the film to be processed 40 by using the third pattern10 a (STEP 10). Here, the second space c will be converted to the thirdspace d; ideally, it is desired that the second space c is the same asthe third space d in width. However, the width occasionally gets wideduring etching the film to be processed. FIG. 6(C) is a top view of FIG.5(C), illustrating the third pattern 40 a formed of the film to beprocessed 40 and the gate insulating film 45 and the diffusion region 80in the lower layer thereof. By the above described fabrication methodusing size conversion etching, the second space c is formed withindevice isolation region between diffusion regions without running on thediffusion region 80 by size conversion etching for carrying out sizeconversion to be described later.

In the present embodiment, a semiconductor substrate is used and apolysilicon film 40 is used as a wiring layer; an amorphous carbon filmis used as a first hard mask layer 30; an Si film is used as a secondhard mask layer 20; an SiOC film (25 nm) is used as a third hard masklayer 10; and film thickness of the anti-reflective coating film 60 is65 nm. A resist 70 is formed on this anti-reflective coating film 60;this resist 70 undergoes trim exposure and development. Thereby, thesecond opening 100 with the space width b being 120 nm is formed (FIG.5(A) and FIG. 7(A)). Next, using an etching apparatus of an ICP type,the anti-reflective coating film 60 and the SiOC film 10 undergo trimetching at CHF3 flow: 75 sccm/He flow: 75 sccm. Then the SiOC film 10can be processed to attain the space width c of 104 nm (FIG. 5(B) andFIG. 7(B)). Etching the polysilicon film 40 with thus formed SiOC film10 a as a mask, the wiring layers 40 a with the space width d of 106 nmare formed as an SRAM counter gate electrodes (FIG. 5(C) and FIG. 7(C)).In addition, the protrusion dimensional of the gate electrode end fromthe diffusion region 80 will become 47 nm.

However, in the actual fabrication steps, the trim exposure position,the trim exposure dimension and the position of diffusion regions varywithin and/or among wafers. Therefore, the following four variablefactors must be considered.

-   (1) Misalignment between the diffusion region 80 and the trim    exposure position: maximum of 50 nm for the both sides (maximum of    25 nm for one side)-   (2) With-in-wafer+wafer-to-wafer actual size dispersion of the    diffusion region 80: 15 nm (maximum of 7.5 nm for one side)-   (3) With-in-wafer+wafer-to-wafer actual size dispersion of trim    exposure dimension b: 15 nm (maximum of 7.5 nm for one side)-   (4) With-in-wafer+wafer-to-wafer actual dispersion of dimension d    after trim etching of the wiring layer 40: 15 nm (maximum of 7.5 nm    for one side)

The above described numeric values exemplify the present embodiment.Those numeric values are appropriately set corresponding to design rulesand products.

It is unrealistic that all of the above described dispersion (1) to (4)occur to simultaneously. Therefore, in consideration of dispersion assum of squares, it is considered that dispersion of 28 nm can occur onone side in the position of the gate electrode 40 a and the position ofthe diffusion region 80. For example, when trim etching without any sizeconversion difference is carried out with the trim exposure dimension bbeing 120 nm, distance d between the SRAM counter gate electrodes aftertrim etching will also become approximately 120 nm. Including thedispersion of 28 nm for one side for consideration, the dimension a1 ofthe end of the gate electrode 40 a protruding from the diffusion region80 will become 11 nm for the distance of 200 nm between the diffusionregions 80.

Moreover, considering the case where the above described SRAM memorycell is shrunk to 90% in order to reduce bit costs, the distance betweenthe diffusion regions 80 is shrunk to 180 nm. The dimension a1 of theend of the gate electrode 40 a protruding from the diffusion region 80will become mere 1 nm including the portion of dispersion of 28 nm forone side so that nearly all margin for fabrication will be lost.Moreover, in the case where a site where the end part of the gateelectrode 40 a runs on the diffusion region 80 occurs, a transistorloses its function so that the SRAM circuit can no longer operate.

Therefore, it is necessary to make the trim exposure dimension b of theresist 70 a small. However, as illustrated in FIG. 8, an intension ofmaking the trim exposure dimension b small to make the dimension dbetween the SRAM counter electrodes small gives rise to a problem ofmaking the DOF small. According to the graph in FIG. 8, in the casewhere the DOF not smaller than 0.2 m is required for fabrication, thetrim exposure dimension is required to be not smaller than minimum 120nm. This trim exposure dimension is stipulated based on resolution ofexposure apparatuses, resulting in, therefore, much larger dimension.

Therefore, size conversion trim etching is carried out to make the trimexposure dimension d of the third hard mask layer smaller than the trimexposure dimension b of the resist to carry out etching with this thirdhard mask layer as a mask. Thereby, it is possible to make the dimensiond between the SRAM counter gate electrodes 40 a be 106 nm for 120 nm ofthe trim exposure dimension b. In addition, the dimension a1 of the endpart of the SRAM counter gate electrode 40 a protruding from thediffusion region 80 can be 8 nm.

FIG. 11 is a graph illustrating the relation between size conversiondifference, which is the difference between the trim exposure dimensionb of the resist and the exposure dimension c of the third hard masklayer 10 a after trim etching, and the flow rate of CHF3 and He, whichare etching gas. For example, by changing CHF3:He from 75:75 sccm to150:50 sccm, the size conversion difference can be changed from 16 nm to22 nm. Accordingly, larger dimension a1 of the end of the gate electrode40 a protruding from the diffusion region 80 can be taken.

FIG. 12 is a graph expressing the size conversion difference (nm) in thecase where CHF3 flow: 75 sccm/He flow: 75 sccm is used as the etchinggas and the third hard mask layers 10 having film thicknesses of 25 nmand 50 nm undergo trim etching. In the case of trim-etching the hardmask layer 10 with 25 nm film thickness, the size conversion difference(b-c) can be approximately 17 nm. In the case of using the hard masklayer 10 with 50 nm film thickness, the size conversion difference (b-c)can be approximately 30 nm.

For the present embodiment, SiOC is used as the third hard mask layer10. However, materials besides SiOC, that is, SiO2, SiON, SiN, SiC andSiOF, SiCN for example, can be used. Also in the case of using thosematerials, trim etching is possible likewise the case of using SiOC.Moreover, in the present embodiment, mixed gas of CHF3 and He is used.However, another etching gas can be used. Such etching gas includes CHF3or CH2F2 or mixed gas thereof. In addition to the etching gas hereof,one or more kinds of gases selected from He, Ar, O2, N2 and CF4 can beused.

A film-like deposit is confirmed to be formed on the side of the etchingface of the anti-reflective coating film 60 a and the hard mask layer 10a when the anti-reflective coating film 60 and the hard mask layer 10undergo etching with gas of the hydrofluorocarbon system such as theCHF3 gas and the CH2F2 gas. This deposit is considered to consist ofpolymer including fluorocarbon supplied from the etching gas. The thusobtained deposit functions as a film for protecting the hard mask layer10 a. As etching progresses deeply, fine processing goes on to obtain atapered concave part at last.

Thus, the size conversion difference depends on types and flow rate ofthe etching gas, film thickness of the hard mask layer and the like.Accordingly, by changing those conditions, a desired space width can beobtained.

Here, a method of setting an etching condition of a size conversion willbe described. As preparation for setting, the relation between theconstitution ratio of gas and the size conversion difference illustratedin FIG. 11, for example is obtained. In addition, the limit experimentalvalue of exposure of the second pattern for isolating the gate line withspace b is obtained. Here, the setting values for the diffusion region,the gate line width and the gate line isolation width are determinedcorresponding to design rules and products. Therefore, the obtainedlimit value of exposure and the isolation width of the gate line arebrought into comparison to determine a required size conversionquantity. An appropriate gas constitution ratio is determined from therequired size conversion quantity based on FIG. 11.

The size conversion difference can be adjusted not only by the gasconstitution ratio but also by the film thickness of the hard mask asdescribed with FIG. 12. Accordingly, the data of the film thickness ofthe hard mask and the size conversion difference in FIG. 12 are obtainedin advance. Thereby, appropriate film thickness of the hard mask can bedetermined from a required size conversion quantity based on FIG. 12 aswell. The relation between the hard mask film thickness and the sizeconversion difference is illustrated in FIG. 12. Moreover, also in thecase of changing the film thickness of the anti-reflective coating film,the likewise relation is obtainable. That is, the relation is that thesize conversion difference gets larger as the film thickness of theanti-reflective coating film included as the second resist layer islarger and larger.

Third Embodiment

In the present embodiment, a method of applying size conversion etchingto the contact hole forming region 110 of the gate line 90 will bedescribed. The contact forming region 110 is formed as a padcorresponding with necessity in accordance with the width of the gateline 90 and the size of the contact hole 120. For the presentembodiment, the gate lines 90 and a contact pad 110 are provided on asubstrate 50 as illustrated in FIG. 14. Contact holes 120 are providedon the contact pad 110. An SiN interlayer film and an SiO2 interlayerfilm are present so as to cover those contact pad 110 and contact holes120. Also for the present embodiment, trim etching is carried out byusing the hard mask layer, the anti-reflective coating film and theresist likewise the first embodiment.

A flow chart of the method of fabricating the semiconductor device ofthe present embodiment is illustrated in FIG. 13. A film to be processedfor forming the lower wiring such as the gate line is formed on thesubstrate. A first pattern is formed on the hard mask layer by using thefirst pattern formed on the first resist layer formed on the filmlikewise the first embodiment as a mask (STEPS 21 to 25). A secondpattern (opening 100) including a first space for carrying out isolationas the first wiring and the second wiring is formed on the second resistlayer (STEPS 26 and 27). Size conversion trim etching is carried out byusing this second pattern (opening 100) as a mask to form a thirdpattern on the hard mask layer. This size conversion etching will form asecond space, which is shrunk from the first space of the second pattern(opening 100), in the third pattern (STEP 28). The film to be processedundergoes further etching by using the hard mask in which the thirdpattern has been formed. The third pattern is formed on the film to beprocessed and first wiring 91 and second wiring 92 are formed (STEP 29).

Subsequently, side wall for the gate line is formed (STEP 31) and theinterlayer insulating film is formed (STEP 32). Such as ion implantationfor forming transistors is appropriately carried out between the STEP 31and the STEP 32. The contact holes connected to the first wiring andsecond wiring isolated by the mask including the second space areopened, embedded with a metal film and connected to the upper layerwiring. (STEP 33) As described above, size conversion trim etching iscarried out. Thereby, the alignment margin at the occasion of formingthe contact holes increases so that an increase of contact resistancecan be suppressed.

FIG. 14(A1) is a drawing illustrating a trim exposure in the idealstate. Here, the pitch of the gate line 90 is 300 nm. The trim exposurepattern opening 100 is rectangular and is located in the center of thecontact pad 110. In the case where the diameter of the contact hole 120is 90 nm; the pitch is 300 nm; the shorter axis dimension of the trimexposure pattern opening 100 is 140 nm, the distance between the end ofthe trim exposure pattern opening 100 and the end of the contact hole120 is 35 nm as illustrated in FIG. 14(A1).

However, the trim exposure pattern opening 100 is ellipsoidal asillustrated in FIG. 14(A2) in the actual trim exposure. FIG. 14(A2) is adrawing illustrating the case where the trim exposure pattern opening100 in FIG. 14(A1) is ellipsoidal. Moreover, actually, displacement ofthe trim exposure pattern opening 100 and with-in-wafer/wafer-to-waferdispersion of positions of the respective member are present. Therefore,the following six items has to be considered.

(1) Displacement of the position of the trim exposure pattern opening100 of the contact pad 110 and the resist: Maximum 50 nm for the bothsides (maximum of 25 nm for one side)

(2) Displacement of the trim exposure pattern opening 100 of the contactpad 110: Maximum 50 nm for the both sides (maximum of 25 nm for oneside)

(3) With-in-wafer+wafer-to-wafer dispersion range of the trim exposurepattern opening 100: 15 nm (maximum of 7.5 nm for one side)

(4) With-in-wafer+wafer-to-wafer dispersion range of the dimension aftertrim etching of the resist: 15 nm (maximum of 7.5 nm for one side)

(5) With-in-wafer+wafer-to-wafer dispersion range of trim exposureposition of the contact pad 110: 10 nm (maximum of 5 nm for one side)

(6) With-in-wafer+wafer-to-wafer dispersion range of the dimension afteretching the contact holes 120: 10 nm (maximum of 5 nm for one side)

The above described numeric values exemplify the present embodiment.Those numeric values are appropriately set corresponding to design rulesand products.

It is unrealistic that all of the above described dispersion (1) to (6)occur simultaneously. Therefore, in consideration of dispersion as sumof squares, it is considered that dispersion of 38 nm can occur on oneside in the position of the trim exposure opening 100. For example, whenetching without any size conversion difference is carried out with thetrim exposure dimension b being 140 nm, the contact pad 110 is etchedonly for approximately 140 nm as illustrated in FIG. 14(B1) so that thecontact holes 120 are left without considering the portion ofdispersion. Here, in FIG. 14(B1), the etched dimension A is nearly equalto the trim exposure dimension b. However, in the case where dispersionof 38 nm for one side in the trim exposure position is present, 3 nm ofthe contact hole 120 will be trimmed as illustrated in FIG. 14(B2) andFIG. 9(A) so that the gate/contact resistance will increase.

Therefore, size conversion etching for processing to attain a sizesmaller than the trim exposure dimension b is used. Here, trim etchingis carried out to make the exposure space width A be 140 nm and theetching width B of the contact pad 110 be 120 nm. In the case where nodisplacement is present in the trim exposure position 100, the contacthole 120 and the contact pad 110 (FIG. 14(C1)), sufficient distancebetween the end of the contact pad 110 and the end of the contact hole120 is present. In addition, as illustrated in FIG. 14(C2), also in thecase where dispersion of 38 nm for one side is present, the distancebetween the end of the contact pad 110 and the end of the contact hole120 is present. Accordingly, the increase of the gate/contact resistancecan be suppressed. Moreover, also in the case where the distance betweenthe contact holes 120 is small, the increase of the gate/contactresistance due to trimming of the contact pad can be prevented.

The etching dimension B can be controlled by applying the methoddisclosed in the first embodiment or the second embodiment and bychanging the anti-reflective coating film to be used, film thickness ofthe hard mask layer and the etching gas.

The method of setting an etching condition of a size conversion in thethird embodiment is carried out likewise the second embodiment. Theisolation width of the gate line in the contact hole forming region isobtained from the design data. The obtained limit value of exposure andthe isolation width of the gate line are brought into comparison todetermine a required size conversion quantity. Then an appropriateetching condition is determined from the relationship between the sizeconversion difference and the gas constitution ratio or the filmthickness of the second resist layer as indicated in FIG. 11 or 12.

So far, embodiments of the present invention have been described withreference to the drawings. However, those embodiments exemplify thepresent invention and various configurations can be adopted besides theabove described configurations as to isolation of wiring patterns inmultilayer wiring and the like.

What is claimed is:
 1. A method of fabricating a semiconductor devicecomprising the steps of: forming a device isolation region in asubstrate to divide a diffusion region into a first and a seconddiffusion regions; forming a film to be processed on the substrate;forming a hard mask layer and a first resist layer on the film to beprocessed; forming a first pattern on the first resist layer; etchingthe hard mask layer by using the first pattern as a mask; forming asecond resist layer on the hard mask layer; forming a second patternincluding a first space on the second resist layer for isolating thefirst pattern; forming a third pattern including a second space shrunkfrom the first space on the hard mask layer by carrying out sizeconversion etching by using the second pattern formed on the secondresist layer as a mask; and etching the film to be processed by usingthe third pattern formed on the hard mask layer.
 2. A method offabricating a semiconductor device comprising the steps of: forming adevice isolation region in a substrate to divide a diffusion region intoa first and a second diffusion regions; forming a film to be processedon the substrate; forming a hard mask layer and a first resist layer onthe film to be processed; forming a first pattern on the first resistlayer; etching the hard mask layer by using the first pattern as a mask;forming a second resist layer on the hard mask layer; forming a secondpattern including a first space on the second resist layer for isolatingthe first pattern; forming a third pattern including a second spaceshrunk from the first space on the hard mask layer by carrying out sizeconversion etching by using the second pattern formed on the secondresist layer as a mask; and etching the film to be processed by usingthe third pattern formed on the hard mask layer, wherein the secondspace is formed in a device isolation region between the first andsecond diffusion regions.
 3. A method of fabricating a semiconductordevice comprising the steps of: forming a device isolation region in asubstrate to divide a diffusion region into a first and a seconddiffusion regions; forming a film to be processed on the substrate;forming a hard mask layer and a first resist layer on the film to beprocessed; forming a first pattern on the first resist layer; etchingthe hard mask layer by using the first pattern as a mask; forming asecond resist layer on the hard mask layer; forming a second patternincluding a first space on the second resist layer for isolating thefirst pattern; forming a third pattern including a second space shrunkfrom the first space on the hard mask layer by carrying out sizeconversion etching by using the second pattern formed on the secondresist layer as a mask; and etching the film to be processed by usingthe third pattern formed on the hard mask layer, wherein ananti-reflective coating film is formed on the hard mask layer.
 4. Amethod of fabricating a semiconductor device comprising the steps of:forming a device isolation region in a substrate to divide a diffusionregion into a first and a second diffusion regions; forming a film to beprocessed on the substrate; forming a hard mask layer and a first resistlayer on the film to be processed; forming a first pattern on the firstresist layer; etching the hard mask layer by using the first pattern asa mask; forming a second resist layer on the hard mask layer; forming asecond pattern including a first space on the second resist layer forisolating the first pattern; forming a third pattern including a secondspace shrunk from the first space on the hard mask layer by carrying outsize conversion etching by using the second pattern formed on the secondresist layer as a mask; and etching the film to be processed by usingthe third pattern formed on the hard mask layer, wherein the hard masklayer comprises at least one kind selected from SiOC, SiO2, SiON, SiN,SiC, SiOF and SiCN.
 5. A method of fabricating a semiconductor devicecomprising the steps of: forming a device isolation region in asubstrate to divide a diffusion region into a first and a seconddiffusion regions; forming a film to be processed on the substrate;forming a hard mask layer and a first resist layer on the film to beprocessed; forming a first pattern on the first resist layer; etchingthe hard mask layer by using the first pattern as a mask; forming asecond resist layer on the hard mask layer; forming a second patternincluding a first space on the second resist layer for isolating thefirst pattern; forming a third pattern including a second space shrunkfrom the first space on the hard mask layer by carrying out sizeconversion etching by using the second pattern formed on the secondresist layer as a mask; and etching the film to be processed by usingthe third pattern formed on the hard mask layer, wherein etching gasused in the size conversion etching step on the hard mask layer isfluorocarbon gas expressed by CxHyFz (x=1 to 5, y=0 to 3, z=1 to 8) orits mixture.
 6. The method of fabricating a semiconductor deviceaccording to claim 5, wherein the fluorocarbon gas is at least one gasselected from CHF3 or CH2F2.
 7. The method of fabricating asemiconductor device according to claim 5, wherein the etching gasfurther includes at least one selected from the group consisting of He,Ar, O2, N2 and CF4.
 8. A method of manufacturing a semiconductor device,comprising: forming a hard mask layer on a material to be processed;forming a first pattern in the hard mask layer; forming a resist layeron the first pattern; forming a second pattern including a first spacein the resist layer; etching the hard mask layer to form a third patternincluding a second space shrunk from the first space by using the secondpattern formed in the resist layer as a mask; and etching the materialto be processed by using the hard mask layer including the first patternand the third pattern.
 9. The method according to claim 8, wherein thematerial to be processed is a conductive film.
 10. The method accordingto claim 8, wherein the third pattern is a gate electrode pattern. 11.The method according to claim 8, wherein the third pattern is a gateelectrode pattern of SRAM.
 12. The method according to claim 8, whereinthe third pattern is a wiring pattern in multilayer wiring.
 13. Themethod according to claim 8, wherein the hard mask layer etching step isperformed by using a gas of the hydrofluorocarbon system.
 14. The methodaccording to claim 13, wherein the hard mask layer includes a materialselected from the group consisting of SiOC, SiO2, SiON, SiN, SiC, SiOFand SiCN.
 15. The method according to claim 13, further comprising thestep of: before the resist film forming step, forming an anti-reflectivecoating film on the first pattern, wherein, in forming the thirdpattern, the anti-reflective coating film and the hard mask layer areetched.